1.1 本指南涵盖了一般类别不锈钢的耐腐蚀金属合金，其中含有铬、镍、锰和硅作为主要合金添加剂，可能还含有钼，这些合金经鉴定或指定用于半导体行业高纯度气体供应系统的部件材料。本指南主要用于测试，以确定是否符合供应商产品规范或客户采购规范或两者中规定的适用成分和冶金规范。 1.2 本指南中分析和报告的要素如下: 1.2.1 合金添加剂铬、镍和钼（如果合金中有规定，如316L型）， 1.2.2 微量元素和残渣锰、硅、铜、钴和稳定剂，如钛和铌（铌），如果存在， 1.2.3 碳、硫和磷， 1.2.4 氮气和氧气， 1.2.5 作为熔炼和铸造实践的一部分，可能添加的任何其他微量元素，如铝和钙， 1.2.6 描述了这些元素的可用标准分析和报告技术。 1.3 要分析和报告的冶金特征包括夹杂物含量、晶粒结构、机械性能和晶间腐蚀敏感性。 1.4 限制: 1.4.1 本指南仅限于范围中规定的一般类别的耐腐蚀金属合金。 1.4.2 本指南中引用的试验方法并非旨在排除使用其他公认的具有同等或更高精度和偏差的技术。 1.4.3 本指南中包含的任何给定元素或冶金特性的测试和分析程序不得解释为将该元素或冶金特性纳入任何规范的要求。 1.5 以国际单位制表示的数值应视为标准。 括号中的英寸-磅单位仅供参考。 1.6 本标准并非旨在解决与其使用相关的所有安全问题（如有）。本标准的用户有责任在使用前制定适当的安全、健康和环境实践，并确定监管限制的适用性。 1.7 本国际标准是根据世界贸易组织技术性贸易壁垒（TBT）委员会发布的《关于制定国际标准、指南和建议的原则的决定》中确立的国际公认标准化原则制定的。 ====意义和用途====== 4.1 本指南定义了考虑安装到高纯度气体分配系统中的部件的测试程序。本指南的应用有望在为该安装进行鉴定而测试的组件之间产生可比数据。 4.2 本指南建立了一个程序，用于确定用于制造半导体行业高纯度气体分配系统部件的金属的元素组成和冶金特性。不锈钢的成分和冶金可能会影响该应用的重要性能，包括表面粗糙度、表面缺陷发生率、钝化、耐腐蚀性和焊接。

1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both. 1.2 Elements analyzed and reported in this guide are as follows: 1.2.1 The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L), 1.2.2 The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present, 1.2.3 Carbon, sulfur and phosphorus, 1.2.4 Nitrogen and oxygen gases, 1.2.5 Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium, 1.2.6 Available standard analytical and reporting techniques are described for these elements. 1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility. 1.4 Limitations: 1.4.1 This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope. 1.4.2 The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias. 1.4.3 Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications. 1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.7 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee. ====== Significance And Use ====== 4.1 This guide defines a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this guide is expected to yield comparable data among components tested for purposes of qualification for this installation. 4.2 This guide establishes a procedure for determining the elemental composition and metallurgical characteristics of metal used to fabricate components for high purity gas distribution systems in the semiconductor industry. The composition and metallurgy of stainless steel may be expected to affect properties of importance to this application, including surface roughness, incidence of surface defects, passivation, corrosion resistance, and welding.