IEC 62047-10:2011规定了微柱压缩试验方法，用于测量MEMS材料的压缩性能，具有高精度、可重复性和中等强度的试样制作。测量了试件的单轴压缩应力应变关系，得到了压缩弹性模量和屈服强度。本标准适用于金属、陶瓷和聚合物材料。 本副本包含2012年2月勘误表的内容。

IEC 62047-10:2011 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. This standard is applicable to metallic, ceramic, and polymeric materials. The contents of the corrigendum of February 2012 have been included in this copy.