IEC 62047-42:2022规定了微悬臂梁上压电薄膜机电转换特性的测量方法，微悬臂梁是实际微传感器和微致动器的典型结构。为了获得具有微器件结构的压电薄膜的实际和精确的压电系数，本文件报告了为消费者、工业或压电器件的任何其他应用确定特征参数的方案。本文件适用于MEMS工艺制备的微悬臂梁上的压电薄膜。

IEC 62047-42:2022 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors and micro actuators. In order to obtain actual and precise piezoelectric coefficient of the piezoelectric thin films with microdevice structures, and this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.